It is actually assumed that in some cases, secondary thermal ALD reactions by the gaseous by-goods may result in an apparently superior conformality than might be realized having a “pure” plasma system. As an illustration, experimental movie thickness profiles acquired for PE-ALD of Al2O3 by Dendooven et al. QCM measurements https://ald-techniques93692.bloggactivo.com/21476344/5-easy-facts-about-atomic-layer-deposition-described